Oxford Plasmalab 80 Plus PECVD

Ref : 2331826-9-W

Condition : Used

Manufacturer : Oxford

Model : Plasmalab 80 Plus PECVD

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 13 Dec. 2023

- Single PECVD chamber, non load-locked
- Input Power: 208V, 3ph
- Heated Platen up to 400 C
- Max Wafer Size 200mm
- PC2000 Software
- Black PLC
- Optional Upgrade Available: X20 PLC with PC4500 Software
- Dual Frequency RF System
- RFX600A HF RF Generator
- Vacuum Pump & Blower (Fomblin Oil Prep)
- Optional Upgrade Availalble: Dry Pump
- Neslab RTE-111 Chiller
- Six Channel Gas Box Currently Equipped with Five MFCs: (CF4/O2, N2, N2O, NH3, SiH4/N2)
- Operations Manual and Documentation

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