Oxford NGP1000

- Load Locked Chamber
- System PC, Keyboard, Mouse
- Windows 7 w/ PC4000 Software
- 490mm Diameter Aluminum Lower Electrode
- Up to 400 degrees Celcius
- Chamber Heating Kit (Heats Chamber Sidewalls to Minimize Process Deposition)
- Dual Frequency RF with Pulsing for Film Stress Control
- 600W 13.56Mhz HF RF Generator
- 600W 2Mhz LF RF Generator
- Pneumatic Chamber Lift Kit
- Adixen ADS602P Dry Pump for Process Chamber
- Adixen ACP40G for Load Lock
- Operations Manual and Documentation
- Fully Refurbished to excellent condition (see below details)