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Oxford Instruments Plasmalab System 100
Ref :
2306590-9-CP
Condition :
Used
Manufacturer :
Oxford Instruments
Model :
Plasmalab System 100
Year(s) :
2001
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
03 Feb. 2024
Description PECVD TEOS with Load Lock
Wafer Size Range
Maximum 200 mm
Process PECVD & TEOS
Controller Type PC Controller Type
Loadlock
Loadlock Yes/No YES
Loadlock Pump Manufacturer & Model Alcatel APT 80 Turbo, ACT 200T Controller
RF Generator Model AE LF5 & AE RFX 600A
Automatch Text Oxford Instruments
Number of Gas Inputs Ten Gas
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