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LAM
Ref :
1831738-9-GO
Condition :
Used
Manufacturer :
LAM
Model :
-
Year(s) :
-
Quantity :
0
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
08 Jun. 2018
LAM 490 Poly /Nitride Etcher
*Fully automated microprocessor control
*High throughput vacuum load locked
*Programmable, variable electrode spacing
*Endpoint detection
*Can be configured for 3" to 6" wafers
*Bulk head mount configuration
*ENI OEM 6 13.56 MHz
*650W RF Generator. 208 V, 3 Phase, 60 Hz
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