Lam Research Novellus Speed
Ref :
254144
Condition :
Used
Manufacturer :
Lam Research
Model :
Novellus Speed
Year(s) :
2000
Quantity :
1
Location :
Seller or machines location:
United States (USA)
United States (USA)
Last check :
26 Feb. 2025
Wafer Size 200 mm
Fab Section Thin Film
General Product Information
Vendor Supplier Lam Research
Model Novellus Speed
Vintage 2000
Asset Description Novellus Speed
Software Version 2.37B24
CIM SECS
Process USG
Hardware Confguration (Fab)
Handler System Mag 7 1 OK
Factory Interface SMIF 2 OK
Main System Novellus Speed OK
Missing/Faulty Parts / Accesorries List
Ebara SDOU 2
Ebara A70W 2
Ebara 150W-M 3
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