Lam Research Novellus Speed

Ref : 2686525-9-FM

Condition : Used

Manufacturer : Lam Research

Model : Novellus Speed

Year(s) : 2000

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Wafer Size 200 mm
Fab Section Thin Film

General Product Information
Vendor Supplier Lam Research
Model Novellus Speed
Vintage 2000
Asset Description Novellus Speed
Software Version 2.37B24
CIM SECS
Process USG

Hardware Confguration (Fab)
Handler System Mag 7 1 OK
Factory Interface SMIF 2 OK
Main System Novellus Speed OK

Missing/Faulty Parts / Accesorries List
Ebara SDOU 2
Ebara A70W 2
Ebara 150W-M 3

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