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Lam Research 2300 Kiyo
Ref :
2707558-9-CP
Condition :
Used
Manufacturer :
Lam Research
Model :
2300 Kiyo
Year(s) :
2008
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Wafer Size Range
Minimum 200 mm
Maximum 200 mm
Set Size 200 mm
Number of Chambers 1
Process Capabilities Plasma Etch
Chamber 1 Description
dual zone ESC
Controller Type VME
Temperature Control Single Pyrometer
External Cooling Water Cooled
Accessories
Rocker Valve for Installation on V2 Mainframe
16 Slot Gasbox
Power Requirements 100-240 V 41.0 A 50/60 Hz
Cooling Water Required Minimum Temperature: 10 ºC (50 ºF, 283.00 ºK) Maximum Temperature: 50 ºC (122 ºF, 323 ºK)
CE Marked YES
Year of Manufacture 2008
Condition Good
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