Lam Research 9600 BRME
Ref :
2675723-9-FM
Condition :
Used
Manufacturer :
Lam Research
Model :
9600 BRME
Year(s) :
1998
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Wafer Size 200 mm
Fab Section Etch
General Product Information
Vendor Supplier LAM
Model 9600 BRME
Vintage 1998
Asset Description Lam 9609 metal etch
Software Version E2.0.1-88B
CIM Secs, GEM
Process Metal Etch
Hardware Confguration (Fab)
Handler System Robot 4
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