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Lam Research 490 Polyimide plasma etcher

Ref : 2698476-9-CP
Condition : Used
Manufacturer : Lam Research
Model : 490 Polyimide plasma etcher
Year(s) : -
Quantity : 1
Location : Seller or machines location:
EUROPE (Western and Northern)

Lam Research 490 Polyimide plasma etcher
Fully Rebuilt by Aspect systems. Â 6 gas inputs. ENI OEM6-XL power supply.
Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

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