LAM Rainbow TCP 9600SE II

LAM Rainbow TCP 9600SE II standalone with DSQ - Plasma Etch

Vintage: 2005+/-5j
Wafersize: 150mm
200mm convertible: Yes
Former BelGaN process: metalpets

TECHNICAL SPEC FOR Etch tool
System Model: LAM Rainbow TCP 9600
Process: Metal etch
Wafer size: 6”
Wafer type: FLAT
Valve type: VAT pendulum valve 65 series
SMIF: No
ESC (Ceramic?): Coated aluminum ESC – LAM # 718-094756-061
Bulkhead: Wall facia are missing
Monochromator Endpoint: Dual endpoint detector - LAM # 853-001983-110
Software: E2.0.1-044
RF: 3x on board Trumpf generators (Top, bias, DSQ)
Cart: No
Iso module: DSQ module
AC box: No
MFC: See pictures of gas box
Gas and process configuration for
- Chamber (1)
- DSQ Strip Chamber

Robot type: Harmonic drive
Loader type: Hine indexers 38A

Loadlock:
Turbo pumps: Alcatel ATH1300MT

Controllers:
▪ Adixen Magpower (Turbo pump)
▪ 12 CH Anafaze temp controller
▪ AC2 controller (throttle valve)
▪ VAT PM7 controller (VAT pendulum valve)
▪ Manual WVDS controller

Gas box: See pictures
AC Rack: See pictures
SW Version: E2.0.1-044
Missing/defective parts: None – tool is operational

Photos to Collect
• All 4 sides
• Robot
• Loader
• Gas lines
• Gas box
• Close up from each chamber
• Turbos and Pumps on each process modules
• Controllers
• Electrical cabinets
• AC Rack
• Gas in/outlets
• Electrical in/outlets
• Chiller
• Serial plates of chamber
• Serial plate of Mainframe
• Serial plate of each pump
• Spare parts, manuals (if any)

Dimensions & weight estimates:
Mainframe dim (cm): 125 x 220 x 190
Mainframe weight (kg): 1500
Bypack1 dim (cm): 50 x 50 x 25
Bypack1 weight (kg): 50