KLA-Tencor

KLA-Tencor
Model
Archer 10 XT
Wafer Size
configurable for 200 mm
Conation Id
I-0025
Configuration
KLA Archer 10 System - Overlay Mainframe only, complete - Configurable for 200 mm

KLA Tencor Interface 300DFFIP:
Asyst Load Port SMIF-300FL (qty. 2)
PRI Pre Aligner PRE-300B-CE
PRI Robot Track TRA035-LPS
Brooks Robot Controller ESC-218BT-S293
Brooks Robot ABM407B-1-S-CE-S293
X-Y Axis Stage:
KLA 5300 XY Assembly Part No: 565 090 513
Leica Objective Lens HC PL Fluotap 100X/0.70
KLA 5300NT PDA Box 710-482350-001
KLA Tencor Power Distributor 10XT
Trenton Computer Box with Improved PS 0059514-001
Vacuum Panel 590-480376-001
KLA Circuit Board 0051644-002
Integrated Dynamics Engineering 3000187_000
ETEl Digital Servo Drive DSB2 (Nanometer) (qty. 5)
KLA Tencor Optics 720-480542-002: