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KLA UV1280 SE
Ref :
2708237-9-CP
Condition :
Used
Manufacturer :
KLA
Model :
UV1280 SE
Year(s) :
1999
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Still installed and in working condition.
Wafer Size 200 mm
Fab Section Metrology
Asset Description PEA816
Software Version Summit 2.61
CIM SECS
Process Film thickness measurement tool
Main System Main body 1 OK
Others NA 0 OK
Factory Interface SMIF 1 OK
Handler System Robot & Pre-aligner 1
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