Eaton Nova Axcelis NV GSD 200 EE

It’s still installed but no longer under power.
It was in Working Condition when decommissioned.
Wafer : 8 Inches.
Vintage : 2000.
It's completer with HDD and Software included.
- 3 Phase
- 50 Hz
- 208 Vac
- Cryo-Pumps: CTI/Edwards Onboard; OB-8 + OB-10 fully refurbished
- Cryo-Compressor: CTI 9650 Low-Voltage
- Turbo-Pumps: Seiko STP A2203 fully refurbished
- Disk-Type: Si-coated Disk fully refurbished
- Wafer-Cooling: no Disk-Chiller included
- Gasbox: 5-String, 4x Toxic-Low-Pressure
- String1: PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
- String2: BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
- String3: AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
- String4: SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
- String5: Argon Carriergas; MFC Brooks GF120 10sccm-N2
- Disk Drive: Direct Drive
- Dose Type: Regular
- Source Type: ELS4 IHC-Source without Vaporizer
- High voltage-Transformer: dry
- Light-Tower: red/yellow/green; no buzzer
- Main-Workstation: SUN Solaris AXI 3HE
- Software-Version:: 6.13.5.1 (no license included)
- Network: 24port 100MB Ethernet with Cisco Router-Kit
- Cell-Controller: V6 Type