Lam Research WETV18-04

Wafer Size Range
Minimum 150 mm
Maximum 300 mm
Set Size 300 mm

Number of Robots 1
Position 1
Tank Material PVDF
Position 2
Tank Material PVDF
Position 3
Tank Material PVDF
Position 4
Tank Material PVDF
Automatic Wafer Transfer YES
Controller Type Microprocessor Controller Type

Other Information
the system was configured by LAM to allow the chemicals to
be pumped up to the cabinets (intermediate tanks for all three media
- see photos) and the attached flow plan (no return pumps in the cabinet!).
Inline heater for media and DI
Main unit: 12-inch system with handler/gripper with flip option; Pinchuck
Intermediate tanks with Trebor pumps
Levitronix flow meters for heater flow sometimes cause problems
FFU was converted to a different controller/fan (see photos)
Chemistry cabinets:
Cabinet 1: Main tank (40L) with buffer tank and buffer function
Cabinet 2: Main tank (40L) with buffer tank and buffer function
Cabinet 3: Pre-tank with 3 paddlewheels/counter and
mix pump and main tank (40L) with buffer tank and buffer function
The chemistry computer motherboard was replaced with a different one
A weld on the drain in Chemistry Cabinet 3 was repaired

Extended Description Details at SP304_Chem_Flowplan.pdf
Condition Good
Power Requirements Other V 80.0 A
CE Marked YES