TEL Tactras Vigus

- Version: 300 mm
-The chamber was last serviced in September 2018
-The chamber is not currently being used
-No missing parts or cables are recorded
-Please refer to the attached photos for details of the chamber condition
-A total of qty 3 chambers are available , all from the same tool, from positions A, E and F

Mainframe options
- Pre-Aligner
- Mini-Environment
- System SW (OS) v5.60
- System SW (App) v5.60
- Complies with SEMI E84