TEL Tactras Vigus RK2

Oxide Etcher, fitted with 4 process chambers
Version: 300 mm
Vintage: 01.06.2010
-Mainframe vintage: June 2010
-Chamber Vintages Vintage: Feb 2011, Dec 2011, Jan 2012, ??
-Deinstalled and warehoused
-Can be inspected by appointment
-Tool type: Vigus RK2
-Mainframe type: TAC-3WW-ZZ-WW
-Gate Valve Type: VAT

Packing list:-
Item #1 EFEM with 3 x Asyst Loadports
Item #2 Transfer Module
Item #3 Process Module 1
Item #4 Process Module 2
Item #5 Process Module 5
Item #6 Process Module 6
Item #7 AC Rack 1
Item #8 AC rack 2
Item #9 Parts Box