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TEL ALPHA-808SC
Ref :
2694390-9-FM
Condition :
Used
Manufacturer :
TEL
Model :
ALPHA-808SC
Year(s) :
1994
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Wafer Size 200 mm
Fab Section Diffusion
General Product Information
Vendor Supplier Tokyo Electron Limited
Model ALPHA-808SC
Vintage 1994.09
Asset Description GATOX-01
Software Version V07.03 R0001
CIM SECS
Process Gate Oxidation
Hardware Confguration (Fab)
Main System Main System 1 OK
Factory Interface SMIF 1 OK
Handler System Wafer Transfer System Robot OK
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