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TEL ALPHA-808S

Ref : 251089
Condition : Used
Manufacturer : TEL
Model : ALPHA-808S
Year(s) : 1995
Quantity : 1
Location : Seller or machines location:
United States (USA)
Last check : 26 Feb. 2025

Tool ID POCL3-01
Tool Status Connected
Wafer Size 200 mm
Fab Section Diffusion

General Product Information
Vendor Supplier TOKYO ELETRON LIMITED
Model TEL ALPHA-808S
Asset Description POCL3-01 VERTICAL DIFFUSION
FURNACE
Software Version TS4000
CIM SECS/GEM
Process POCL3

Hardware Confguration (Fab)
Main System Main System (1)
Handler System robot
Factory Interface SMIF (2)

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