TEL ALPHA-808S

Ref : 2657268-9-FM

Condition : Used

Manufacturer : TEL

Model : ALPHA-808S

Year(s) : 1995

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Tool ID POCL3-01
Tool Status Connected
Wafer Size 200 mm
Fab Section Diffusion

General Product Information
Vendor Supplier TOKYO ELETRON LIMITED
Model TEL ALPHA-808S
Asset Description POCL3-01 VERTICAL DIFFUSION
FURNACE
Software Version TS4000
CIM SECS/GEM
Process POCL3

Hardware Confguration (Fab)
Main System Main System (1)
Handler System robot
Factory Interface SMIF (2)

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