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TEL ALPHA-808S
Ref :
2657268-9-FM
Condition :
Used
Manufacturer :
TEL
Model :
ALPHA-808S
Year(s) :
1995
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Tool ID POCL3-01
Tool Status Connected
Wafer Size 200 mm
Fab Section Diffusion
General Product Information
Vendor Supplier TOKYO ELETRON LIMITED
Model TEL ALPHA-808S
Asset Description POCL3-01 VERTICAL DIFFUSION
FURNACE
Software Version TS4000
CIM SECS/GEM
Process POCL3
Hardware Confguration (Fab)
Main System Main System (1)
Handler System robot
Factory Interface SMIF (2)
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