TEL Alpha 8S

Wafer Size 200 mm
Fab Section Diffusion

General Product Information
Vendor Supplier TEL
Model TEL ALPHA 8S
Vintage 1996
Asset Description DFN-04 Vertical Diffusion System
Software Version TS4000Z
CIM SECS,GEM
Process BPSemi BE Densi

Hardware Confguration (Fab)
System Type Description Quantity Status
Handler System Wafer Trasnferer 1 OK
Handler System Carrier Transferer 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
Description Quantity Status
UPS Battery Unit 1 OK