ASML XT1900Gi

Wafer Size 300 mm
Fab Section Lithography

General Product Information
Vendor Supplier ASML
Model XT1900Gi
Vintage 2008
Asset Description 193nm Immersion scanner
Software Version 5.1
CIM secs
Process 40/45nm

Hardware Confguration (Fab)
Handler System wfr handler OK
Factory Interface FOUP 1 OK
Main System main body 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
MCWC 1 OK
WISR 1 OK
body 1 OK
MDC 1 OK
LCWC 1 OK
laser 1 OK
WICR 1 OK
flter cabinet 1 OK
ACC 1 OK