ASML 5500 / 275D

Wafer Size 200 mm
Fab Section Lithography

General Product Information
Vendor Supplier ASML
Model 5500/275D
Asset Description AUTOMATIC WAFER STEPPED
Software Version 8.8.6.c
CIM SECS
Process ILINE STEPPER

Hardware Configuration (Fab)
Main System MAIN BODY OK 1
Handler System Wafer Transfer Unit OK 1
Options System ELECTRONIC CABINET OK
Others Operator Console Unit 1

Hardware Configuration (Subfab / Auxilliary Units)
C&T CABINET 1
POWER TRANSFORMER 1
ADVANCE ALIGNMENT SYSTEM 1