ASML AT850C

Wafer Size 300 mm
Fab Section Lithography

General Product Information
Vendor Supplier ASML
Model AT850C
Vintage 2004
Asset Description 248nm KrF
Software Version 4.1
CIM secs
Process 65/130nm

Hardware Confguration (Fab)
Main System main body 1 OK
Handler System wfr handler 1 OK
Factory Interface FOUP 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
laser 1 OK
ACC 1
flter cabinet 1 OK
LCWC 1 OK
MCWC 1 OK
mdc 1 OK

Missing/Faulty Parts / Accesorries List
ACC faulty 1