ASML AT400C

Ref : 254474

Condition : Used

Manufacturer : ASML

Model : AT400C

Year(s) : 2004

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 300 mm
Fab Section Lithography

General Product Information
Vendor Supplier ASML
Model AT400C
Vintage 2004
Asset Description 365nm I-line
Software Version 4.1
CIM secs
Process 65/130nm

Hardware Confguration (Fab)
Main System body 1 OK
Handler System wfr handler OK
Factory Interface FOUP 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
MCWC 1 OK
ACC 1 OK
MDC 1 OK
LCWC 1 OK

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