ASML XT1400E

Wafer Size 300 mm
Fab Section Lithography

General Product Information
Vendor Supplier ASML
Model XT1400E
Vintage 2007
Asset Description ASML TWINSCAN XT1400E
Software Version 4.1.0
CIM SECS
Process Lithography

Hardware Confguration (Fab)
Main System Exposure Unit 1 OK
Handler System OK
Options System OK
Others OK
Factory Interface FOUP 1 OK
Handler System Wafer Handler 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
MCWC 1 OK
MDC 1 OK
LCWC 1 OK
Filter Cabinet 1 OK
ACC 1 OK
Cymer laser 1 OK

Missing/Faulty Parts / Accesorries List
Mirror Block and XY motor 1