ASML AT850C

Wafer Size 300 mm
Fab Section Lithography

General Product Information
Vendor Supplier ASML
Model AT850D
Vintage 2004
Asset Description 248nm KrF
Software Version 4.1
CIM secs
Process 65/130nm

Hardware Confguration (Fab)
Main System body 1 OK
Handler System wfr handler OK
Factory Interface FOUP 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
flter cabinet 1 OK
LCWC 1 OK
MDC 1 OK
laser 1 OK
MCWC 1 OK
ACC 1
body 1 OK

Missing/Faulty Parts / Accesorries List
ACC 1