20 Allwin21 UPgrade Kits ([email protected])

Please visit our website for updated information at www.allwin21.com

Updated Brochure in2024：https://allwin21.com/wp-content/uploads/2024/05/Allwin21-Product-Brochures-Upgrade-Kits-2024.5-1.pdf

Please help fill in the upgrade kits RFQ at our website for suitable configuration for your used semiconductor equipment . Appreciate your time.



Why upgrade your old used semiconductor process equipment ?

Low cost solution of obsolete components and parts.
Use new air cooling RF generator to replace the obsolete water cooling RF Generator, avoiding water flood in Fab/Lab.
Use new integrated solid robotic wafer transfer to replace the obsolete index/frog robotic wafer transfer
Requirement of stability of the system
Requirement of network function (GEM/SECSII).
Requirement of PC control for data storage.
Requirement of GUI.
Requirement of more precise control.
Requirement of better repeatability, uniformity.
Requirement of easier maintenance, calibration, and trouble shooting.


Upgrade Kits (PDF)



Allwin21 Corp. has been focusing on providing solutions and enhancements to the following used semiconductor equipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They’ve each been PROCESS-PROVEN. Allwin21 Corp. can refurbish and/or upgrade these OEM systems with Allwin21′s comparable integrated process control system with PC, solid 3-axis robotic wafer transfer system (if applicable), and new critical components to achieve the goal of giving our customers a production edge with right cost.

We have been doing upgrade for many production proven equipment, such as Perkin-Elmer 2400, Perkin-Elmer 4400, Perkin-Elmer 4410, Perkin-Elmer 4450, Perkin-Elmer 4480, Matrix 105 , Matrix 106, Matrix 303, Matrix 303, Matrix 403, Matrix 205, Matrix 101, Matrix 102, Matrix 103, Matrix 104,Tegal 901e, Tegal 903e, Lam Research LAM AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Branson/IPC 2000, Branson IPC 3000, Branson/IPC 4000, Gasonics Aura 3000, Gasonics Aura 3010, Gasonics L3510, Gasoncis Aura 1000, Gasonics AE 2001, AG Associates Heatpulse 610, AG Associates Heatpulse 410, AG Associates Minipulse 310, AG Associates Heatpulse 210 on the field for many cases. The reliability have been improved a lot for most of the tools after upgrading. We designed the upgrade kits for these working tools that can do plug and play and most of them only need 2 to 3 days include training. For PE sputter, since it is a little complicated, but we still target to upgrade within one week include training if the machine without other problems.

Upgraded Equipment Models :
Heatpulse 210
Heatpulse 410
Heatpulse 610
Perkin-Elmer 4400
Perkin-Elmer 4410
Perkin-Elmer 4450
Perkin-Elmer 4480
Perkin-Elmer 2400
Matrix 105
Matrix 106
Matrix 101
Matrix 102
Matrix 103
Matrix 104
Matrix 111
Matrix 10
Matrix 205
Matrix 303
Matrix 403
Tegal 901e
Tegal 903e
Gasonics Aura 1000
Gasonics AE 2001
Gasonics Aura 3010
Gasonics 2000LL
Gasonics L3510
Lam AutoEtch 490
Lam AutoEtch 590
Lam AutoEtch 690
Lam AutoEtch 790
Lam AutoEtch 480
Lam AutoEtch 580
Lam AutoEtch 680
Lam AutoEtch 780
Branson/IPC 3000
Branson/IPC 2000
Branson/IPC 4000

Please find the info on our production proven equipment and upgrade kits.

( https://allwin21.com/documents/ )

Allwin21 Brochures: Rapid Thermal Processors
Allwin21 Brochures: Sputtering Deposition Equipment
Allwin21 Brochures: Plasma Asher Descum Equipment
Allwin21 Brochures: Plasma Etcher RIE Equipment
Allwin21 Brochures: Thin Film Metrology
Allwin21 Brochures: Upgrade Kits
Allwin21 Brochures: All Products
PPT on Why AccuThermo AW 610M RTP
PPT on Why AccuThermo AW820M RTP
PPT on Why AW-105R Plasma Asher Descum
PPT on Why AW-B3000 Barrel Batch Manual Asher Descum
PPT on Why AW-1008 Microwave Plasma Asher
PPT on Why AccuSputter AW4450 Sputter Deposition Equipment
PPT on Why AW-901eR AW-903eR Plasma Etcher
PPT on Why AW-303R Plasma Etcher
PPT on Why AWgage-150 AWgage-200 Metrology
PPT on Upgrade Kit for Gasonics L3510
PPT on Upgrade Kit for Gasonics Aura 1000
PPT on Upgrade Kit for Gasonics Aura 3000 Gasonics Aura 3010
PPT on Upgrade Kit for Gasonics Aura 2000LL
PPT on Upgrade Kit for Gasonics AE 2000LL
PPT on Upgrade Kit for Gasonics AE 2001
PPT on Upgrade Kit for Tegal 901e Tegal 903e
PPT on Upgrade Kit for Lam AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790
PPT on Upgrade Kit for Matrix 101,Matrix 102, Matrix 103,Matrix 104,Matrix 105,Matrix 106, Matrix 108,Matrix 205,Matrix 206, Matrix 208, Matrix 303,Matrix 403
PPT on Upgrade Kits for Branson/IPC 2000, Branson/IPC 3000, Branson/IPC 4000, Barrel Asher, Barrel Etch, Barrel Etcher
Video on Why AccuThermo AW610M RTP
Video on Why AccuThermo AW820M RTP
Video on AccuThermo AW610
Video on AW-105R Asher Descum
Video on AW-1008 Plasma Asher
Video on AW-3000 Plasma Asher
Video on AW-901eR AW-903eR Plasma Etch
Video on AccuSputter AW4450 Sputter Deposition Equipment
Video on Upgrade Kit for Lam AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790