Varian 3190

Ref : 2303538-9-CP

Condition : Used

Manufacturer : Varian

Model : 3190

Year(s) : -

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 03 Feb. 2024

Vacuum System Cryo Pumped
Load Lock Included Yes
Number of RF Etch Cathodes 1
Substrate Heaters Yes
Residual Gas Analyzer Yes
DC Power Supply
Output Power 12.00 kW DC
RF Generator
Rated Power Output 1000 Watts
Matching Network Yes
Power Requirements 480 V 22.0 A 60 Hz 3 Phase

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