Temescal Ferrotec FC-2000 Ebeam Evaporator with Ion Gun Etch

Temescal Ferrotec FC-2000 Ebeam Evaporator with
Ion Gun Etch. The FC-2000 is a fast- cycle,
load-locked system that allows the source to
remain under vacuum during substrate reloading.
The system is configured with a 6 pocket electron gun with
a supersweep 64 sweep controller and
the CV-6SLX 6KW E-gun power supply.
The system also has a single resistive thermal
deposition source. There is a 3-cm Ion source for etch or
assisted deposition. Also includes the Inficon XTC/3S crystal
deposition controller with dual crystal holder.
System has a lift off dome for 4" wafers and variable speed
substrate rotation.
Standard source-to-substrate distance: 19.5″.
The bell jar is 20" diameter.
The Temescal Control System (TCS) provides fully integrated,
recipe-driven process and vacuum control.
Operating in any of three password-protected modes,
the TCS also offers process variable monitoring,
process and historical trend tracking, and process data logging.
The TCS Automatic Mode.
Auto mode operation provides fully automated execution of
user-programmed recipes consisting of up to
twenty process steps, as well as full abort diagnostics.
The TCS Auto Mode also offers independent autopump and
autovent operations, automated cryopump regeneration, and
automated rate-of-rise testing. Manual Mode Operation.
The TCS manual mode enables the user to
set process parameters, operate major components and
subsystems individually with full interlock protection, and
execute nonautomated single-film deposition processes.
Service Mode Operation. The TCS service mode provides noninterlocked low-level control over any of the system’s
valves, pumps, motors, or power supplies.
System Power 208V, 3Ph, 60Hz