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Tepla 600-AL
Ref :
2470137-9-W
Condition :
Used
Manufacturer :
Tepla
Model :
600-AL
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
28 Jun. 2024
– Used for photoresist stripping and surface cleaning, as well as etching silicon and its compounds
– Chamber Size: 245mm diameter, 380mm depth
– Chamber Material: ceramic
– ENI RF Generator: 0-600 Watt, 13.56 MHz
– Semi-Automatic RF Plasma System
– Can process up to 200mm wafers
– Gases: 4 channels controlled by 4 MFCs
– Leybold D65B Vacuum Pump
– Dimensions: 740mm x 624mm x 701mm + connections
– Electrical: 230V, 50/60Hz, 15A, 2kW
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