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Tepla 3027 E
Ref :
2637402-9-CP
Condition :
Used
Manufacturer :
Tepla
Model :
3027 E
Year(s) :
1992
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Plasma etcher
Capacity: 10 panels
Max. panel size: 500 x 610 mm
Volume: 3.0 m3, 4 gas chambers.
Chamber dimensions: 1100 x 1250 x 2050 mm
Switch cabinet dimensions: 800 x 600 x 2000 mm
Cage dimensions: 750 x 650 x 660 mm.
Electrical connections: 220 / 380 V - 3 x 20 A - 3 Ph.
Including one NEW spare cage en one NEW vacuum pump.
Connected to power and can be demonstrated.
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