Candela, Tencor CS20

Spectroscopic ellipsometry:
Measures the change in polarization state of
light reflected from a sample to determine various parameters.

Reflectometry:
Measures the intensity of light reflected from
a sample at different wavelengths to
extract information about the sample's properties.

Multiple angle of incidence (AOI):
Allows measurements at different angles to
capture information about the sample's sidewall angles and
other geometric features.

High accuracy and precision:
Provides precise measurements of critical dimensions and
other parameters required for semiconductor manufacturing.

Automated data analysis:
Capable of analyzing the collected measurement data and
providing statistical insights.