TEL, Tokyo Electron ACT 8

Photoresist coater and developer track with 3C and 3D
Version: 200 mm
Vintage: 01.09.2001
Recently de-installed and warehoused.
Can be inspected by appointment.
Please refer to the attached images shows some photos of
the tool, and the block diagram.

Configuration:
- Wafer Flow : Left to Right
- Main Controller : #2
- Coater Unit
. 2-1, 2-2 : 8 dispense nozzle for each unit
. 2-3 : 4 dispense nozzle
. RRC Pump
- Developer Unit
. E3 nozzle
- TCU : 1 Set (Cllo power : 7ea, Pump : 8ea)
- THC : 1 Set (ESA-4-D-02)
- Chemical Box 1 : PR Bottle, RRC Pump 8set
- Chemical Box 2 : HMDS 1set, Thinner 2 tank auto supply 1set, DEV 2 tank auto supply 1set
- AC Power Box : 1 Set
- IFB : 1 Set
- Missing Parts
. IRA Main Y Driver, Z Driver
. WEE Lamp house
. 3-1, 3-3 Spin Motor Driver