4 Canon FPA 3000 i4 Stepper

Vintages: 3x 1995 1x1996
Configuration: left inline system; Inline with TEL Mark 7-S Coater Developer
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle major hardware and
software changes in control system: EWS type changed to
HP B180, O/S changed to HP-UX 10.20,
original X-Terminal replaced by a Windows PC + 17" touchscreen TFT
Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping
no UPS installed. No printer installed. No MO-drive
EOL: optical parts
Last Time in production: 05/24