TEL MK7-S

Wafer Size Range
Minimum 200 mm
Maximum 200 mm
Condition Good
CE Marked YES
Exterior Dimensions
Width 135.827 in (345.0 cm)
Depth 55.118 in (140.0 cm)
Height 80.709 in (205.0 cm)

missing parts: 2 resist pumps, 1Developer Line

Add. Info:
TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes
Last Time in production 1/1/24