TEL Lithius

Wafer Size 300 mm
Fab Section Lithography

General Product Information
Vendor Supplier TEL
Model LITHIUS
Vintage 2008
Asset Description 248 NM KRF TRACK, LITHIUS
Software Version 3.00.57
CIM SECS
Process ARF

Hardware Confguration (Fab)
Main System DEV 5 OK
Main System Main Tool 1 OK
Main System BCT 3 OK
Main System ADH 3 OK
Handler System IRAS 1 OK
Handler System OK
Handler System PRA 3 OK
Handler System CRA 1 OK
Main System CPHP 23 OK
Handler System OK
Handler System IRAM 1 OK
Main System COT 3 OK
Main System TCT 2 OK
Main System LHP 2 OK
Factory Interface FOUP 5 OK

Hardware Confguration (Subfab / Auxilliary Units)
Temperature & Humidity Controller 2 OK
COT Chemical Cabinet 1 OK
DEV Chemical Cabinet 1 OK
AC Power Box 1 OK