TEL Lithius

Wafer Size 300 mm
Fab Section Lithography

General Product Information
Vendor Supplier TEL
Model LITHIUS
Vintage 2005
Asset Description 2-Block-Machine
Software Version 300.0.130.2
CIM SECS
Process Coat, Development

Hardware Confguration (Fab)
Main System Lithius 2-Block 1 OK
Handler System TEL robot (CRA/PRA_3x/IRAM/IRAS) OK
Factory Interface FOUP 5 OK

Hardware Confguration (Subfab / Auxilliary Units)
Coater Cabinet 1 OK
Temp./ Hum.Controller 2 OK
Resist Cabinet 1 OK
Developer Cabinet 1 OK
PowerBox 1 OK