TEL Lithius Pro -I

Wafer Size 300 mm
Fab Section Lithography

General Product Information
Vendor Supplier TOKYO ELECTRON LIMITED
Model LITHIUS PRO-I
Vintage 2015
Asset Description LATK765-T (DISCRETE BUY) (EXSLB1-LATK765-S/N MDN150752)
Software Version 1.00.81
CIM SECS
Process ARF IMMERSION

Hardware Confguration (Fab)
Main System DEV 6 OK
Main System CPRP 6 OK
Main System CSWP 6 OK
Main System CGRA 11 OK
Handler System PRAI 1 OK
Handler System Foup Exchanger 1 OK
Handler System PRA 4 OK
Handler System IRAI 1 OK
Handler System MPRA 1 OK
Handler System CRA 1 OK
Main System Main Tool 1 OK
Main System COT 3 OK
Main System BCT 3 OK
Factory Interface FOUP 4 OK
Main System ITC 3 OK

Hardware Confguration (Subfab / Auxilliary Units)
AC Power Box 1 OK
COT Chemical Cabinet 1 OK
Temperature & Humidity Controller 1 OK
DEV Chemical Cabinet 1 OK