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TEL ACT8
Ref :
2688555-9-FM
Condition :
Used
Manufacturer :
TEL
Model :
ACT8
Year(s) :
2002
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Wafer Size 200 mm
Fab Section Lithography
General Product Information
Vendor Supplier TEL
Model ACT8
Vintage 2002
Software Version 1.18.003
CIM SECS
Process COAT/DEVELOP
Hardware Confguration (Fab)
Handler System PRA 2 OK
Handler System IRA 1 OK
Factory Interface SMIF 3 OK
Main System MAIN BODY 1 OK
Handler System CRA 1 OK
Hardware Confguration (Subfab / Auxilliary Units)
T&H 1 OK
TCU 1 OK
MAIN POWER BLOCK 1 OK
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