TEL ACT8

Ref : 254137

Condition : Used

Manufacturer : TEL

Model : ACT8

Year(s) : 2002

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 200 mm
Fab Section Lithography

General Product Information
Vendor Supplier TEL
Model ACT8
Vintage 2002
Software Version 1.18.003
CIM SECS
Process COAT/DEVELOP

Hardware Confguration (Fab)
Handler System PRA 2 OK
Handler System IRA 1 OK
Factory Interface SMIF 3 OK
Main System MAIN BODY 1 OK
Handler System CRA 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
T&H 1 OK
TCU 1 OK
MAIN POWER BLOCK 1 OK

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