Suss RC8-MS3

Photoresist Spin Coater for max 200mm substrates
spin coater with GYRSET system for better uniformity and lower resin consumption
Quick exchange Gyrset
motorized and programmable dispense arm
max 200mm wafer or 6"x6" square substrate
stainless base cabinet
Maximum 5000 rpm/sec acceleration
motorized dispense arm
multiple dispense capability for up to 2 photoresist
Cybor 512 power supply with 505 controller (will control 1-2 pumps)
1 Cybor 5126C pump
resist nozzle autoclean
cartridge dispense