Suss MicroTec Falcon Polyimid Developer

Condition: very good
Developer with 2 chambers for spray developing.
Wafer Size Range
Minimum 150 mm
Maximum 200 mm
Photoresist Type Negative
Number of Cassette Elevators 2
Number of Developer Dispensers 2
Wafer Backside Rinse YES
Number of Hot Plates 0
Number of Chill Plates 0
Controller Type Microprocessor Controller Type
Power Requirements 380 V 50/60 Hz 3 Phase