Semitool Raider 210 ECD

WAFER SIZE 8"
Type: Electroplating
Model Number: R310PD2(1SA2CFD1CAP)08(CuNi)03
SYSTEM GENERAL CONFIGURATION
3 X Cassette WIP
1 X Capsule (Backside Clean & Backside Bevel Etch), 2 X ECD (CFD3), 1 X SRD
1 X Linear Dual Arm Robot with Single Vacuum End effector
1 X ARU (Advanced Replenishment Unit)
2 X CDU (Chemical Delivery Unit)
2 x Heat Exchanger
1 x DI Boost Pump Unit
Fire Suppression System with three CO2 bottles

MAIN POWER
208 VAC, 3Phase, 4 Wires, 50/60 Hz

COMPUTER & CONTROL
1 x WIP Computer, 1 X Module Computer, 1 X Robot Computer
1 X FUI (Front User Interface), 1X RUI (Rear User Interface)
502 Controller with WINDOWS EMBEDDED OS
Tool Software Version is unknown

MISSING PARTS
Contacts Rings and lip seals (Consumable)
Anodes (Consumable)