Nikon NSR-S208D

Ref : 2674281-9-CP

Condition : Used

Manufacturer : Nikon

Model : NSR-S208D

Year(s) : 2011

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Version: 300 mm
Vintage: 01.06.2011
CE Marked
-Still installed in fab
-Can be inspected by appointment
-Laser type: Cymer ELS 7410
-Chiller type: Sendai S62B
-Wafer track on left side of scanner

Standard Performance Specifications
Resolution ≦ 110 nm
NA 0.82
Exposure light source KrF excimer laser (248 nm wavelength)
Reduction ratio 1:4
Exposure field 26 × 33 mm
Alignment accuracy ≦ 10 nm
Throughput ≧ 147 wafers/hour (300 mm wafer, 76 shots)

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