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Nikon NSR-S208D
Ref :
2674281-9-CP
Condition :
Used
Manufacturer :
Nikon
Model :
NSR-S208D
Year(s) :
2011
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Version: 300 mm
Vintage: 01.06.2011
CE Marked
-Still installed in fab
-Can be inspected by appointment
-Laser type: Cymer ELS 7410
-Chiller type: Sendai S62B
-Wafer track on left side of scanner
Standard Performance Specifications
Resolution ≦ 110 nm
NA 0.82
Exposure light source KrF excimer laser (248 nm wavelength)
Reduction ratio 1:4
Exposure field 26 × 33 mm
Alignment accuracy ≦ 10 nm
Throughput ≧ 147 wafers/hour (300 mm wafer, 76 shots)
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