Rigaku TXRF-V300

Vendor Supplier RIGAKU
Model TXRF-V300
Vintage 2007
Software Version 1.55
CIM SEC/GEM
Process TXRF measurement

Hardware Configuration (Fab)
Main System Main Body 1
Handler System Robot
Factory Interface FOUP 2
Options System TXRF VPD 1

Missing/Faulty Parts / Accesorries List
SD Board 1
z-scan Motor 1
IG Board 1
Anode Controller SGPPXD-40 Servo Driver 1
Power supply unit 1 XG generator 1
Ion Gauge MG-2 1
XG-Generator AC Fan 4
IG Board; Electronic component "LOG-627" 1
TMP RTPG-152 1
XG-Generator 1
LLC elevator motor 1
Pulse processor 1
TXRF_DISPLAY 1