KLA-Tencor 2835

Wafer Size 300 mm
Fab Section Defect Detection

General Product Information
Vendor Supplier KLA
Model 2835 Brightfeld Inspection
Vintage 2012
Process Brightfeld Inspection

Hardware Confguration (Fab)
Main System Electron Source and Column Assembly 1 OK
Handler System KLA integrated frontend Phoenix 2 1 OK
Main System Loadlock 1 OK
Factory Interface SMIF 2 OK
Main System MAIN CHAMBER 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
IMC racks + Laser and chiller 4 OK

Missing/Faulty Parts / Accesorries List
Main PS 1
Stage Controller 1
Stage Interferometer 1