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Plasmatherm SLR 770 ICP
Ref :
2655739-9-CP
Condition :
Used
Manufacturer :
Plasmatherm
Model :
SLR 770 ICP
Year(s) :
1998
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Last knows condition: operational, one analog I/O box is
not working.
Application: deep silicon etch
Substrate size: 4”
Semi-auto load lock, single wafer
1.0kW ICP RF package (2kW generator limited to 1.0kW)
500W RF bias
Gas box with 5 lines (CHF3, C4F8, SF6, Ar, O2)
ThermoFlex 900 chiller
Edwards ih80 dry pump
Edwards nxds load lock dry pump
Load lock small turbo pump Leybold
Edwards STPA-1303CV turbo
380VAC 3 phase
Through-wall installation package
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