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Plasmatherm SLR 770
Ref :
2673574-9-CP
Condition :
Used
Manufacturer :
Plasmatherm
Model :
SLR 770
Year(s) :
1994
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Dual Chamber R.I.E.
Version: 200 mm
Vintage: 01.06.1994
includes:
-LH and RH chambers are RIE with adjustable top electrode gap.
(similar to old ECR config.)
Both chambers can work also as PE (Plasma Etch-Top power).
RIE or PE is switched by software.
Both Chambers are Low pressure feature with TMP turbo pumps.
Each chamber has 8 gas lines and MFC's.
Software and manuals along with Neslab HX-75 chiller are included.
The load lock arm needs some work.
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