Plasmatherm SLR 770

Dual Chamber R.I.E.
Version: 200 mm
Vintage: 01.06.1994
includes:
-LH and RH chambers are RIE with adjustable top electrode gap.
(similar to old ECR config.)
Both chambers can work also as PE (Plasma Etch-Top power).
RIE or PE is switched by software.
Both Chambers are Low pressure feature with TMP turbo pumps.
Each chamber has 8 gas lines and MFC's.
Software and manuals along with Neslab HX-75 chiller are included.
The load lock arm needs some work.