Oxford Plasmalab 100 ICP

OXFORD PLASMALAB 100 ICP ETCHER consisting of:
- Manufacturer: Oxford Instruments
- Model: Plasmalab System 100 ICP-RIE 180
- Process gases used: H2, O2, N2, Ar, CF4, SF6, CHF3,
He, CH4, HBr, Cl2 and BCl3
- Cryo Table w/ operating temp: -150 to 400C
- Substrate cooling: using liquid nitrogen (LN2)
- RF source 300 W, 13.56 MHz
- ICP source 3000 W, 13.56 MHz
- Base pressure: 5E-7 Torr
- Horiba Laser Endpoint Detector
- Load Locked

Pumps:
Main Chamber Backing Pump:
- Manufacturer: Adixen
- Type: Dry pump (multi roots)
- Model: ADP 122 P

Main Chamber Turbo Pump:
- Manufacturer: Adixen
- Type: Turbo
- Model: ATH 1300

Load Lock:
- Manufacturer: Adixen
- Type: Dry pump (multi roots)
- Model: ACP 15G

REFURBISHED TO MEET OEM SPECIFICATIONS consisting of:
- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and
replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning,
and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to specifications.
- Post-refurbishment system leak and RF calibration checks,
with documentation provided to customer.
- System cycle and repeatability testing completed prior to
cover replacement and wipe down.
- System components carefully packed, labeled, and professionally crated.