Allwin21 AW-105R ([email protected])

Please visit our website for updated information at www.allwin21.com

Updated Brochure in2024：https://allwin21.com/wp-content/uploads/2024/05/Allwin21-Product-Brochures-Plasma-Asher-Descum-2024.5-1.pdf

Why Allwin21 AW-1008 Semiconductor front end plasma asher descum euqipment: https://allwin21.com/wp-content/uploads/2024/05/AW-105R-Plasma-Asher-Descum-Clean.pdf

Brand: Allwin21 Corp.
Allwin21 Corp. AW-105R Plasma Asher

Wafer Size: 2″ – 6″ Capability
Wafer Loading: 3-axis Robot; Stationary Cassette Plate
Plasma Power: 600W Air-Cooled RF 13.56MHz
Type: Parallel/Single Wafer Process; Stand-Alone
Gas Lines: 1-3 Lines MFCs

Specifications

Rate: 0.5-1.5 um/min at 200 to 250 ºC, bulk strip.600 A/min at 100 ºC, Descum
Removal Uniformity: