KLA-Tencor UV-1280SE Thin Film Measurement System

Model: Prometrix UV-1280SE
Configured for 100mm and 150mm handling
Measures Film Thickness, Refractive Index (RI) and
Extinction Coefficient of
Single and Multi-Layer Thin Film Stacks
Simultaneously without Referencing
Reflectivity Range of 220 nm to 800 nm
Intel Pentium Computer
Operations Manuals Included
Fully Refurbished to Excellent Condition

MEASUREMENT CAPABILITIES:
Single Layer Thickness (t):
- Thermal Oxide: 0 Å to 40 µm
- Oxynitride: 0 Å to 30 µm
- Nitride: 0 Å to 25 µm
- BPSG: 0 Å to 40 µm
- Photoresist: 0 Å to 40 µm
- Polyimide: 0 Å to 40 µm
- Poly on Oxide: 50 Å to 2 µm Poly on
40 Å to 4000 Å Oxide
- Poly on Nitride: 50 Å to 2 µm Poly on
40 Å to 4000 Å Nitride
- Amorphous Silicon: 50 Å to 2 µm Amorphous on
40 Å to 4000 Å Oxide or

Nitride
- Oxide on Poly: 50 Å to 1 µm Oxide on