KLA-Tencor Surfscan 6420

KLA-TENCOR SURFSCAN 6420 PARTICLE INSPECTION SYSTEM consisting of:
- Model: Surfscan 6420
- Particle inspection system
- Substrate/Sizes: 2", 3", 4", 6" and 8" Wafer Capable
- Substrate Thickness: Adjustable up to 12 mm.
- Material: any surface that scatters less than
90% of incident light
- Cassette Handling: Single puck handling from
single cassette or platform.
- Defect Sensitivity: Most Surfaces: Better than 0.12 um
(depending upon surface quality).
- Defect Sensitivity: Polished Silicon: Better than 0.12 um at
95% capture rate.
- Illumination Source: 30 mW Argon-Ion laser,
488 nm wavelength
- Operating Software: Windows 98 Operating Software
- Operations Manual and Documentation