KLA-Tencor SFS 6200

Model SFS 6200
Wafer Size 8"
Vintage 1994-2
Tool's Condition Excellent

Description
*.Configuration:
- Wafer Size : 4 - 8 inch.
- Non-patterned surface Inspection System.
- 0.1 micron Defect Sensitivity (PSL STD).
- 0.02 ppm Haze Sensitivity.
- 0.002 ppm Haze Resolution.
- Accuracy within 1%.
- XY coordinates.
- Lock Down accessories.
- Tencor approved blower assembly.
- 30mW New Ar-Laser
- 208V/60HZ, 17A.
- Windows 3.1.
- Software version: 2.1

*. Fully refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time.